✦ LIBER ✦

Capacitive absolute pressure sensors with hybrid structure

✍ Scribed by Masayosi Esashi; Shuichi Shoji; Toshitada Wada; Tomio Nagata

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-precision capacitative absolute pre

✍ A. Jornod; F. Rudolf 📂 Article 📅 1989 🏛 Elsevier Science ⚖ 459 KB

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✍ Narducci, M; Yu-Chia, L; Fang, W; Tsai, J 📂 Article 📅 2013 🏛 Institute of Physics 🌐 English ⚖ 941 KB

A capacitive absolute-pressure sensor wi

✍ Park, J-S; Gianchandani, Y B 📂 Article 📅 2000 🏛 Institute of Physics 🌐 English ⚖ 273 KB

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✍ Chang, Sung-Pil; Allen, Mark G 📂 Article 📅 2004 🏛 Institute of Physics 🌐 English ⚖ 288 KB

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✍ M. Habibi; E. Lueder; T. Kallfass; D. Horst 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 282 KB

Micromachined sensor structures with lin

✍ Lars Rosengren; Jan Söderkvist; Leif Smith 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 520 KB