A capacitive absolute-pressure sensor with external pick-off electrodes

✍ Scribed by Park, J-S; Gianchandani, Y B

• Book ID: 118186788
• Publisher: Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 273 KB
• Volume: 10
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/10/4/307