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Novel metalorganic chemical vapor deposition system for GaN growth

✍ Scribed by Nakamura, Shuji; Harada, Yasuhiro; Seno, Masayuki

Book ID: 115479600
Publisher: American Institute of Physics
Year: 1991
Tongue: English
Weight: 491 KB
Volume: 58
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.105239

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