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Stress evolution during metalorganic chemical vapor deposition of GaN

✍ Scribed by Hearne, S.; Chason, E.; Han, J.; Floro, J. A.; Figiel, J.; Hunter, J.; Amano, H.; Tsong, I. S. T.

Book ID: 120979553
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 286 KB
Volume: 74
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.123070

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