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Novel ALD Process for Depositing CaF 2 Thin Films

✍ Scribed by Pilvi, Tero; Arstila, Kai; Leskelä, Markku; Ritala, Mikko

Book ID: 125985949
Publisher: American Chemical Society
Year: 2007
Tongue: English
Weight: 440 KB
Volume: 19
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm0629412

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