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The surface chemistry of thin film atomic layer deposition (ALD) processes for electronic device manufacturing

✍ Scribed by Zaera, Francisco

Book ID: 121363191
Publisher: Royal Society of Chemistry
Year: 2008
Tongue: English
Weight: 571 KB
Volume: 18
Category: Article
ISSN: 0959-9428
DOI: 10.1039/B803832E

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