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Non-destructive thickness characterization of Si based heterostructure by X-ray diffraction and reflectivity

✍ Scribed by Xue-Chao Liu; M. Myronov; A. Dobbie; Van H. Nguyen; D.R. Leadley

Book ID: 108271854
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 939 KB
Volume: 60
Category: Article
ISSN: 0038-1101
DOI: 10.1016/j.sse.2011.01.036

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