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Non-destructive depth compositional profiles by XPS peak-shape analysis

✍ Scribed by M. C. López-Santos; F. Yubero; J. P. Espinós; A. R. González-Elipe

Publisher
Springer
Year
2009
Tongue
English
Weight
390 KB
Volume
396
Category
Article
ISSN
1618-2650

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The accuracy of XPS and AES quantiÐcation by peak shape analysis was established from a detailed analysis of a range of model spectra and three sets of experiments. It was found that information on the concentration-depth proÐle in the surface region up to depths of (where is the inelastic electron