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Non-destructive depth profile analysis using synchrotron radiation excited XPS

✍ Scribed by Zier, Michael ;Oswald, Steffen ;Reiche, Rainer ;Wetzig, Klaus


Publisher
Springer-Verlag
Year
2006
Weight
145 KB
Volume
156
Category
Article
ISSN
0344-838X

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Synchrotron radiation-excited glancing i
✍ P. Kregsamer; Christina Streli; P. Wobrauschek; H. Gatterbauer; P. Pianetta; L. πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 144 KB

First results of depth profile and thin-film analysis by glancing incidence x-ray fluorescence analysis of low-Z elements (carbon to aluminum), usually not detectable by conventional instruments, were obtained by synchrotron radiation excitation (SSRL, Beamline III-4) and by a special energy-dispers