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Noble gas influence on reactive radio frequency magnetron sputter deposition of TiN films

โœ Scribed by C.P Lungu; M Futsuhara; O Takai; M Braic; G Musa

Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
542 KB
Volume
51
Category
Article
ISSN
0042-207X

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