Nanoscratch study of ZnO thin films deposited using radio frequency magnetron sputtering
โ Scribed by Wei-Hung Yau; Pai-Chung Tseng; Derming Lian
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 1003 KB
- Volume
- 269
- Category
- Article
- ISSN
- 0168-583X
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๐ SIMILAR VOLUMES
An improvement of thickness distribution and crystallinity in ZnO thin films prepared by radio frequency (rf) planer magnetron sputtering have been studied. Optimum thickness distribution of less than22.2% in a 3-inch wafer is obtained by changing the substrate angle to the ZnO target and is in acco
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