✦ LIBER ✦

Stoichiometry dependence of electrochemical performance of thin-film SnOx microbattery anodes deposited by radio frequency magnetron sputtering

Publisher: Elsevier Science
Year: 2001
Weight: 195 KB
Volume: 42
Category: Article
ISSN: 0140-6701
DOI: 10.1016/s0140-6701(01)80403-3

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✦ Synopsis

natural gas reduces carbon dioxide by 47.2%, and natural gas reforming and incineration of synthesis gas reduces carbon dioxide by 45.3%. It is possible to remove the formed carbon dioxide from the flue gases, compress it and then utilize it.

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Thin films of carbon mixed LiFePO 4 were prepared by ionized magnetron sputter deposition (IMSD) and post anneal. The IMSD technique uses a built-in radio frequency coil to generate an inductively coupled plasma (ICP) confined close to the substrate. Therefore, the films were deposited under concurr