The influence of deposition parameters on the performance of tin dioxide NO2 sensors prepared by radio-frequency magnetron sputtering

✍ Scribed by Geraint Williams; Gary S.V. Coles

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 517 KB
• Volume: 25
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/0925-4005(95)85100-3

✦ Synopsis

Gas-sensitive tin oxide films of varying thickness prepared by a two-step metal-film deposition/thermal-oxidation technique respond selectively to low levels of NO, in the presence of high reducing-gas concentrations. Optimization studies show that an increase in film thickness leads to increased hydrogen cross-sensitivity while the oxidizing-gas response remains relatively constant for all the sensors tested. Hence short sputter times favour selective NO2 detection. In comparison, reactively sputtered films of comparable thickness exhibit significantly higher reducing-gas sensitivity under the same conditions.