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Nitridation-enhanced conductivity behavior and current transport mechanism in thin thermally nitrided SiO2

✍ Scribed by Cheng, X. R.; Cheng, Y. C.; Liu, B. Y.


Book ID
126075851
Publisher
American Institute of Physics
Year
1988
Tongue
English
Weight
790 KB
Volume
63
Category
Article
ISSN
0021-8979

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