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NiTi/Pb(Zr0.52Ti0.48)O3 thin film heterostructures for vibration damping in MEMS

✍ Scribed by Choudhary, Nitin; Kharat, D.K.; Van Humbeeck, J.; Kaur, Davinder

Book ID: 123312176
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 549 KB
Volume: 193
Category: Article
ISSN: 0924-4247
DOI: 10.1016/j.sna.2012.12.005

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