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Nickel–palladium bond pads for copper wire bonding

✍ Scribed by Horst Clauberg; Petra Backus; Bob Chylak


Book ID
104056434
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
615 KB
Volume
51
Category
Article
ISSN
0026-2714

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The random formation of micrometric crystals on Al bonding pads can be an issue affecting wire bonding metal pad quality. The dry etch chemistry used to remove final passivation dielectric layers from the top of the bonding Al pad area is in fact based mainly on fluorine-containing gases (such as CF