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Nickel-silicide process for ultra-thin-body SOI-MOSFETs

✍ Scribed by M. Schmidt; T. Mollenhauer; H.D.B. Gottlob; T. Wahlbrink; J.K. Efavi; L. Ottaviano; S. Cristoloveanu; M.C. Lemme; H. Kurz

Book ID
108207509
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
278 KB
Volume
82
Category
Article
ISSN
0167-9317

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