✦ LIBER ✦

News Ticker: Imaging & Microscopy 2/2007

Publisher: Wiley (John Wiley & Sons)
Year: 2007
Weight: 81 KB
Volume: 9
Category: Article
ISSN: 1439-4243
DOI: 10.1002/imic.200790161

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✦ Synopsis

and co-workers form the University of Sofia, Bulgaria, describe a low-cost microcontroller based control and data acquisition unit for digital image recording of scanning electron microscope (SEM) images and scanning electron microscope based electron beam lithography (EBL). It incorporates major time critical functions for image acquisition and electron beam lithography and makes the unit an intelligent module which communicates with the main computer via USB. The system allows, for instance, the recording of images with up to 4096 × 4096 pixel size, different scan modes, controllable dwell time, synchronization with main power frequency, and can extend the scanning electron microscope capabilities for electron beam lithography.

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