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New Precursors for the CVD of Zirconium and Hafnium Oxide Films

✍ Scribed by J.-S. M. Lehn; S. Javed; D. M. Hoffman

Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
270 KB
Volume
12
Category
Article
ISSN
0948-1907

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