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New multitarget sputtering system for production of pure thin films

✍ Scribed by Varian Vacuum Division

Publisher: Elsevier Science
Year: 1974
Tongue: English
Weight: 158 KB
Volume: 24
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(74)91833-8

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