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A new production process for thin metal films: High frequency inductive sputtering : P. Beucherie et al., Vuoto Sci. Tecnol. 2, No. 3, June (1969), p. 81. (In Italian.)


Publisher
Elsevier Science
Year
1970
Tongue
English
Weight
107 KB
Volume
9
Category
Article
ISSN
0026-2714

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