✦ LIBER ✦
1499. A new ion source for the vacuum sputtering of thin films: H Tamura, J Vac Soc Japan, 14 (6), 1971, 224–230 (in Japanses)
- Publisher
- Elsevier Science
- Year
- 1971
- Tongue
- English
- Weight
- 139 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0042-207X
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