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New MOCVD precursor for iridium thin films deposition

✍ Scribed by Xin Yan; Qiuyu Zhang; Xiaodong Fan

Book ID: 113790034
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 194 KB
Volume: 61
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2006.04.034

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