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New approach for the preparation of nanoporous polyorganosilicate low-k films

✍ Scribed by Kai Xi; Rui Guo; Yangyang Weng; Hui He; Qiang Shao; Jie Cai; Qingmin Chen; Xuehai Yu; Xudong Jia

Book ID
101588785
Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
435 KB
Volume
103
Category
Article
ISSN
0021-8995

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