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Electrical properties of nanoporous F doped SiO2low-k thin films prepared by sol-gel method with catalyst HF

✍ Scribed by Zhi-Wei He; Xue-Qin Liu; Da-Yin Xu; Yong-Ping Guo; Yin-Yue Wang

Publisher: Springer
Year: 2006
Tongue: English
Weight: 331 KB
Volume: 13
Category: Article
ISSN: 1380-2224
DOI: 10.1007/s10934-006-8039-9

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