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Improvement of electrical properties of low dielectric constant nanoporous silica films prepared using sol–gel method with catalyst HF

✍ Scribed by Z.W. He; X.Q. Liu; Q. Su; Y.Y. Wang

Publisher: Springer
Year: 2005
Tongue: English
Weight: 711 KB
Volume: 82
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-005-3376-0

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