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Nanostructured silicon carbon thin films grown by plasma enhanced chemical vapour deposition technique

✍ Scribed by Coscia, U.; Ambrosone, G.; Basa, D.K.; Rigato, V.; Ferrero, S.; Virga, A.


Book ID
123125488
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
454 KB
Volume
543
Category
Article
ISSN
0040-6090

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