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Nanopatterning of silicon surfaces by low-energy ion-beam sputtering: dependence on the angle of ion incidence

✍ Scribed by Gago, R; Vázquez, L; Cuerno, R; Varela, M; Ballesteros, C; Albella, J M

Book ID
127014847
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
222 KB
Volume
13
Category
Article
ISSN
0957-4484

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