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Nanoimprinting lithography on 200 mm wafers for optical applications

✍ Scribed by N. Chaix; S. Landis; C. Gourgon; S. Merino; V.G. Lambertini; G. Durand; C. Perret

Book ID: 108207727
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 563 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.01.132

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