✦ LIBER ✦
Self-consistent simulation study on magnetized inductively coupled plasma for 450 mm semiconductor wafer processing
✍ Scribed by Ho-Jun Lee; Yun-Gi Kim
- Book ID
- 118501884
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 746 KB
- Volume
- 521
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.