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Investigations on HCl contaminated Cu 200 mm wafers using Parallel Angle Resolved XPS

✍ Scribed by B. Pelissier; A. Beaurain; H. Fontaine; A. Danel; O. Joubert

Book ID: 104052235
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 404 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.01.025

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Investigations on HCl contaminated Cu 200&#xa0;mm wafers using Parallel Angle Resolved XPS

Investigations on HCl contaminated Cu 200 mm wafers using Parallel Angle Resolved XPS