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HF contamination of 200 mm Al wafers: A parallel angle resolved XPS study

✍ Scribed by B. Pelissier; H. Fontaine; A. Beaurain; A. Danel; O. Joubert

Book ID: 104052772
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 481 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.11.004

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HF contamination of 200&#xa0;mm Al wafers: A parallel angle resolved XPS study

HF contamination of 200 mm Al wafers: A parallel angle resolved XPS study