Nanocavities in silicon: An infrared investigation of internal surface reconstruction after hydrogen implantation

✍ Scribed by E. Romano; D. Narducci; F. Corni; S. Frabboni; G. Ottaviani; R. Tonini; G.F. Cerofolini

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 392 KB
• Volume: 159-160
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2008.05.012