✦ LIBER ✦
An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing
✍ Scribed by D. Giubertoni; G. Pepponi; M. Bersani; S. Gennaro; F. D’Acapito; R. Doherty; M.A. Foad
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 172 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0168-583X
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