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Nano-structure formed by nanosecond laser annealing on amorphous Si surface

✍ Scribed by D. Klinger; E. Łusakowska; D. Żymierska

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
240 KB
Volume
9
Category
Article
ISSN
1369-8001

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Thin nano-structured carbon films have been deposited in vacuum by pulsed laser ablation, from a rotating polycrystalline graphite target, on Si h1 0 0i substrates, kept at temperatures ranging from RT to 800 8C. The laser ablation was performed by a Nd:YAG laser, operating in the near IR (l = 1064