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Nano-scale scratching in chemical–mechanical polishing

✍ Scribed by N. Saka; T. Eusner; J.-H. Chun

Publisher: International Academy for Production Engineering
Year: 2008
Tongue: English
Weight: 626 KB
Volume: 57
Category: Article
ISSN: 0007-8506
DOI: 10.1016/j.cirp.2008.03.098

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