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Prediction of scratch generation in chemical mechanical planarization

✍ Scribed by A. Chandra; P. Karra; A.F. Bastawros; R. Biswas; P.J. Sherman; S. Armini; D.A. Lucca

Publisher
International Academy for Production Engineering
Year
2008
Tongue
English
Weight
299 KB
Volume
57
Category
Article
ISSN
0007-8506

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