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Microelectronic Applications of Chemical Mechanical Planarization || Modeling

โœ Scribed by Li, Yuzhuo

Publisher
John Wiley & Sons, Inc.
Year
2007
Weight
675 KB
Edition
1
Category
Article
ISBN
0471719196

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Microelectronic Applications of Chemical
Microelectronic Applications of Chemical Mechanical Planarization || Electrochemistry in ECMP
โœ Li, Yuzhuo ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› John Wiley & Sons, Inc. โš– 955 KB

JINSHAN (JASON) HUO ### 10.1 Introduction Electrochemical polishing, or electropolishing, is conventionally used for producing shiny surfaces where mechanical polishing is difficult to perform. Examples include components with complicated surfaces, decorative items, and other special applications.