✦ LIBER ✦

Multilevel grating array illuminators manufactured by electron-beam lithography

✍ Scribed by Mats Ekberg; Michael Larsson; Sverker Hård; Jari Turunen; Mohammad R. Taghizadeh; Jan Westerholm; Antti Vasara

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Simultaneous exposure of filter gratings

✍ R. Steingrüber; M. Hamacher 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 347 KB

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Guided Formation of a Sub-10 nm Silicide

✍ J.-S. Wi; T.-Y. Lee; H.-M. Kim; H.-S. Lee; S. -W. Nam; I. J. Shin; K. H. Shin; K 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 689 KB

Fabrication of arrays of line with nanos

✍ Shi-Long Lv; Zhi-Tang Song; Song-Lin Feng 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 653 KB