✦ LIBER ✦
Guided Formation of a Sub-10 nm Silicide Dot Array on an Area Patterned by Electron-Beam Lithography
✍ Scribed by J.-S. Wi; T.-Y. Lee; H.-M. Kim; H.-S. Lee; S. -W. Nam; I. J. Shin; K. H. Shin; K.-B. Kim
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 689 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0935-9648
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