✦ LIBER ✦
Fabrication of arrays of line with nanoscale width and large length by electron beam lithography with high-precision stage
✍ Scribed by Shi-Long Lv; Zhi-Tang Song; Song-Lin Feng
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 653 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0026-2692
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