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Multilayer analysis by high resolution backscattering spectrometry

โœ Scribed by James R. Huddle


Book ID
113279921
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
293 KB
Volume
40-41
Category
Article
ISSN
0168-583X

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The potential of high resolution Rutherford Backscattering (RBS) for identification and quantification of trace elements in thin films was investigated. A beam of 250 keV d + ions from the AN700 van de Graaff accelerator in Linz was used to characterize the composition of an organic multi-element co