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High-resolution Rutherford backscattering spectrometry and the analysis of very thin silicon nitride layers

✍ Scribed by Y. Tamminga; M.F.C. Willemsen; F.H.P.M. Habraken; A.E.T. Kuiper

Publisher: Elsevier Science
Year: 1982
Weight: 450 KB
Volume: 200
Category: Article
ISSN: 0167-5087
DOI: 10.1016/0167-5087(82)90476-8

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