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High-resolution rutherford backscattering spectrometry of metal-silicon interfaces

✍ Scribed by J.F. Van Der Veen; E.J. Van Loenen

Publisher: Elsevier Science
Year: 1986
Weight: 46 KB
Volume: 168
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(86)90492-5

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