𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Multi-range silicon micromachined flow sensor

✍ Scribed by N. Sabaté; J. Santander; L. Fonseca; I. Gràcia; C. Cané

Book ID
118501086
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
570 KB
Volume
110
Category
Article
ISSN
0924-4247

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Silicon micromachining for integrated ra
Silicon micromachining for integrated radiant sensors
✍ R.F. Wolffenbuttel 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 684 KB

Advances m sdlcon nucromachmmg technology have greatly contributed towards the evolution of slhcon micromechamcal sensors and have added to the vlahhty of mlcroactuators fabrxated m slhcon Both bulk and surface nucromaclunmg have also be-en employed for the reahzatlon of various new types of radiant