Silicon micromachining for integrated radiant sensors

✍ Scribed by R.F. Wolffenbuttel

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 684 KB
• Volume: 30
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(92)80204-g

✦ Synopsis

Advances m sdlcon nucromachmmg technology have greatly contributed towards the evolution of slhcon micromechamcal sensors and have added to the vlahhty of mlcroactuators fabrxated m slhcon Both bulk and surface nucromaclunmg have also be-en employed for the reahzatlon of various new types of radiant sensors Moreover, the performance of certam conventional radiant sensor types IS greatly enhanced by subjecting the sensor structure to a m~cromactmung step The nucromaclunmg technology mvolved IS usually adopted after successful lmplementatlon m a mlcromechamcal sensor, which hmlts the impact of these efforts on the technology and seemingly results in a one-way traffic from technology research towards this branch of sensor research However, several techmques that have been commonplace m optics can, dependmg on the defimtlon of mlcromaclnnmg, also be regarded as non-conventional nucromachmmg steps The mterachon between optics and nucromachmmg IS, therefore, less tnvlal A survey IS presented here on the application of conventional and non-conventional mlcromactunmg techniques to radiant sensors