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Vacuum-sealed silicon micromachined pressure sensors

✍ Scribed by Esashi, M.; Sugiyama, S.; Ikeda, K.; Wang, Y.; Miyashita, H.

Book ID
118186836
Publisher
IEEE
Year
1998
Tongue
English
Weight
317 KB
Volume
86
Category
Article
ISSN
0018-9219

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Sextant Avionique is currently developing a new family of micromachined silicon pressure sensors. The target accuracy is \(10^{-4}\) full scale. Therefore, the basic principle uses a vibrating concept. A membrane is stressed by the pressure and this activates a vibrating beam, the frequency of which