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Force balanced micromachined pressure sensors

✍ Scribed by Gogoi, B.P.; Chuan Che Wang; Mastrangelo, C.H.

Book ID: 114538763
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 334 KB
Volume: 48
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.936563

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