Pressure sensors merge micromachining and microelectronics

✍ Scribed by Randy Frank

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 804 KB
• Volume: 28
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(91)85018-j

✦ Synopsis

Sensing system requirements vary considerably from system to system and depend heavily upon the market segment and application : automotive versus industrial, manifold absolute pressure versus blood pressure. Both of these particular examples utilize micromachined silicon and have been the focus of several manufacturers' efforts for the past decade . The experience obtained from supplying these products in volume and working with customers to determine future sensing requirements is leading to new types of sensors and increased integration . This paper will present some of the problems that confront the development and manufacture of more complex silicon structures and integrated control circuits .