A micromachined pressure sensor with fiber-optic interferometric readout
β Scribed by M.A. Chan; S.D. Collins; R.L. Smith
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 758 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0924-4247
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